Temperature Measurement during Millisecond Annealing: Ripple Pyrometry for Flash Lamp Annealers

Name: Temperature Measurement during Millisecond Annealing: Ripple Pyrometry for Flash Lamp Annealers
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Denise Reichel

2016년 1월 · Springer

5.0

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eBook 정보

Denise Reichel studies the delicate subject of temperature measurement during lamp-based annealing of semiconductors, in particular during flash lamp annealing. The approach of background-correction using amplitude-modulated light to obtain the sample reflectivity is reinvented from rapid thermal annealing to apply to millisecond annealing. The author presents a new method independent of the lamp operation to obtain this amplitude modulation and derives a formula to describe the process. Further, she investigates the variables of the formula in depth to validate the method’s suitability for background-corrected temperature measurement. The experimental results finally proof its power for elevated temperatures.

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5.0

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저자 정보

Dr. Denise Reichel currently works in technical sales and consulting for temperature measurement needs and as a lecturer for thermodynamics and heat and mass transfer.