Superconducting Multilayer Technology for Josephson Devices : Technology, Engineering, Physics, Applications
Meckbach, Johannes Maximilian
Dis 2013 · Karlsruher Schriftenreihe zur Supraleitung Ibhuku elingu-13 · KIT Scientific Publishing
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Within this book fabrication processes for high-quality Josephson junctions based on niobium and aluminum oxide as well as niobium nitride and aluminum nitride on various substrates are discussed. Techniques for achieving a planar chip topography and sub-μm lateral dimensions, aiding the realization of sophisticated Josephson devices such as SQUIDs, flux-flow oscillators and long Josephson junctions with artificial phase discontinuities, are presented in detail.
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