Microelectromechanical Systems: Advanced Materials and Fabrication Methods

ยท ยท ยท ยท
ยท National Academies Press
แƒ”แƒšแƒฌแƒ˜แƒ’แƒœแƒ˜
57
แƒ’แƒ•แƒ”แƒ แƒ“แƒ˜
แƒ แƒ”แƒ˜แƒขแƒ˜แƒœแƒ’แƒ”แƒ‘แƒ˜ แƒ“แƒ แƒ›แƒ˜แƒ›แƒแƒฎแƒ˜แƒšแƒ•แƒ”แƒ‘แƒ˜ แƒ“แƒแƒฃแƒ“แƒแƒกแƒขแƒฃแƒ แƒ”แƒ‘แƒ”แƒšแƒ˜แƒ ย แƒจแƒ”แƒ˜แƒขแƒงแƒ•แƒ”แƒ— แƒ›แƒ”แƒขแƒ˜

แƒแƒ› แƒ”แƒšแƒฌแƒ˜แƒ’แƒœแƒ˜แƒก แƒจแƒ”แƒกแƒแƒฎแƒ”แƒ‘

Microelectromenchanical systems (MEMS) is a revolutionary field that adapts for new uses a technology already optimized to accomplish a specific set of objectives. The silicon-based integrated circuits process is so highly refined it can produce millions of electrical elements on a single chip and define their critical dimensions to tolerances of 100-billionths of a meter. The MEMS revolution harnesses the integrated circuitry know-how to build working microsystems from micromechanical and microelectronic elements. MEMS is a multidisciplinary field involving challenges and opportunites for electrical, mechanical, chemical, and biomedical engineering as well as physics, biology, and chemistry. As MEMS begin to permeate more and more industrial procedures, society as a whole will be strongly affected because MEMS provide a new design technology that could rival--perhaps surpass--the societal impact of integrated circuits.

แƒจแƒ”แƒแƒคแƒแƒกแƒ”แƒ— แƒ”แƒก แƒ”แƒšแƒฌแƒ˜แƒ’แƒœแƒ˜

แƒ’แƒ•แƒ˜แƒ—แƒฎแƒแƒ แƒ˜แƒ— แƒ—แƒฅแƒ•แƒ”แƒœแƒ˜ แƒแƒ–แƒ แƒ˜.

แƒ˜แƒœแƒคแƒแƒ แƒ›แƒแƒชแƒ˜แƒ แƒฌแƒแƒ™แƒ˜แƒ—แƒฎแƒ•แƒแƒกแƒ—แƒแƒœ แƒ“แƒแƒ™แƒแƒ•แƒจแƒ˜แƒ แƒ”แƒ‘แƒ˜แƒ—

แƒกแƒ›แƒแƒ แƒขแƒคแƒแƒœแƒ”แƒ‘แƒ˜ แƒ“แƒ แƒขแƒแƒ‘แƒšแƒ”แƒขแƒ”แƒ‘แƒ˜
แƒ“แƒแƒแƒ˜แƒœแƒกแƒขแƒแƒšแƒ˜แƒ แƒ”แƒ— Google Play Books แƒแƒžแƒ˜ Android แƒ“แƒ iPad/iPhone แƒ›แƒแƒฌแƒงแƒแƒ‘แƒ˜แƒšแƒแƒ‘แƒ”แƒ‘แƒ˜แƒกแƒ—แƒ•แƒ˜แƒก. แƒ˜แƒก แƒแƒ•แƒขแƒแƒ›แƒแƒขแƒฃแƒ แƒแƒ“ แƒ’แƒแƒœแƒแƒฎแƒแƒ แƒชแƒ˜แƒ”แƒšแƒ”แƒ‘แƒก แƒกแƒ˜แƒœแƒฅแƒ แƒแƒœแƒ˜แƒ–แƒแƒชแƒ˜แƒแƒก แƒ—แƒฅแƒ•แƒ”แƒœแƒก แƒแƒœแƒ’แƒแƒ แƒ˜แƒจแƒ—แƒแƒœ แƒ“แƒ แƒกแƒแƒจแƒฃแƒแƒšแƒ”แƒ‘แƒแƒก แƒ›แƒแƒ’แƒชแƒ”แƒ›แƒ—, แƒฌแƒแƒ˜แƒ™แƒ˜แƒ—แƒฎแƒแƒ— แƒกแƒแƒกแƒฃแƒ แƒ•แƒ”แƒšแƒ˜ แƒ™แƒแƒœแƒขแƒ”แƒœแƒขแƒ˜ แƒœแƒ”แƒ‘แƒ˜แƒกแƒ›แƒ˜แƒ”แƒ  แƒแƒ“แƒ’แƒ˜แƒšแƒแƒก, แƒ แƒแƒ’แƒแƒ แƒช แƒแƒœแƒšแƒแƒ˜แƒœ, แƒ˜แƒกแƒ” แƒฎแƒแƒ–แƒ’แƒแƒ แƒ”แƒจแƒ” แƒ แƒ”แƒŸแƒ˜แƒ›แƒจแƒ˜.
แƒšแƒ”แƒžแƒขแƒแƒžแƒ”แƒ‘แƒ˜ แƒ“แƒ แƒ™แƒแƒ›แƒžแƒ˜แƒฃแƒขแƒ”แƒ แƒ”แƒ‘แƒ˜
Google Play-แƒจแƒ˜ แƒจแƒ”แƒซแƒ”แƒœแƒ˜แƒšแƒ˜ แƒแƒฃแƒ“แƒ˜แƒแƒฌแƒ˜แƒ’แƒœแƒ”แƒ‘แƒ˜แƒก แƒ›แƒแƒกแƒ›แƒ”แƒœแƒ แƒ—แƒฅแƒ•แƒ”แƒœแƒ˜ แƒ™แƒแƒ›แƒžแƒ˜แƒฃแƒขแƒ”แƒ แƒ˜แƒก แƒ•แƒ”แƒ‘-แƒ‘แƒ แƒแƒฃแƒ–แƒ”แƒ แƒ˜แƒก แƒ’แƒแƒ›แƒแƒงแƒ”แƒœแƒ”แƒ‘แƒ˜แƒ— แƒจแƒ”แƒ’แƒ˜แƒซแƒšแƒ˜แƒแƒ—.
แƒ”แƒšแƒฌแƒแƒ›แƒ™แƒ˜แƒ—แƒฎแƒ•แƒ”แƒšแƒ”แƒ‘แƒ˜ แƒ“แƒ แƒกแƒฎแƒ•แƒ แƒ›แƒแƒฌแƒงแƒแƒ‘แƒ˜แƒšแƒแƒ‘แƒ”แƒ‘แƒ˜
แƒ”แƒšแƒ”แƒฅแƒขแƒ แƒแƒœแƒฃแƒšแƒ˜ แƒ›แƒ”แƒšแƒœแƒ˜แƒก แƒ›แƒแƒฌแƒงแƒแƒ‘แƒ˜แƒšแƒแƒ‘แƒ”แƒ‘แƒ–แƒ” แƒฌแƒแƒกแƒแƒ™แƒ˜แƒ—แƒฎแƒแƒ“, แƒ แƒแƒ’แƒแƒ แƒ˜แƒชแƒแƒ Kobo eReaders, แƒ—แƒฅแƒ•แƒ”แƒœ แƒฃแƒœแƒ“แƒ แƒฉแƒแƒ›แƒแƒขแƒ•แƒ˜แƒ แƒ—แƒแƒ— แƒคแƒแƒ˜แƒšแƒ˜ แƒ“แƒ แƒ’แƒแƒ“แƒแƒ˜แƒขแƒแƒœแƒแƒ— แƒ˜แƒ’แƒ˜ แƒ—แƒฅแƒ•แƒ”แƒœแƒก แƒ›แƒแƒฌแƒงแƒแƒ‘แƒ˜แƒšแƒแƒ‘แƒแƒจแƒ˜. แƒ“แƒแƒฎแƒ›แƒแƒ แƒ”แƒ‘แƒ˜แƒก แƒชแƒ”แƒœแƒขแƒ แƒ˜แƒก แƒ“แƒ”แƒขแƒแƒšแƒฃแƒ แƒ˜ แƒ˜แƒœแƒกแƒขแƒ แƒฃแƒฅแƒชแƒ˜แƒ”แƒ‘แƒ˜แƒก แƒ›แƒ˜แƒฎแƒ”แƒ“แƒ•แƒ˜แƒ— แƒ’แƒแƒ“แƒแƒ˜แƒขแƒแƒœแƒ”แƒ— แƒคแƒแƒ˜แƒšแƒ”แƒ‘แƒ˜ แƒ›แƒฎแƒแƒ แƒ“แƒแƒญแƒ”แƒ แƒ˜แƒš แƒ”แƒšแƒฌแƒแƒ›แƒ™แƒ˜แƒ—แƒฎแƒ•แƒ”แƒšแƒ”แƒ‘แƒ–แƒ”.
แƒฃแƒ™แƒแƒœแƒแƒœแƒ แƒ™แƒแƒœแƒขแƒ”แƒœแƒขแƒ˜แƒก แƒจแƒ”แƒกแƒแƒฎแƒ”แƒ‘ แƒ›แƒแƒฎแƒกแƒ”แƒœแƒ”แƒ‘แƒ

แƒ›แƒ”แƒขแƒ˜ แƒแƒ•แƒขแƒแƒ แƒ˜แƒกแƒ’แƒแƒœ Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems

Microelectromechanical Systems: Advanced Materials and Fabrication Methods
National Research Council
35,14ย โ‚ฌ

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