Metal Oxide Nanostructures as Gas Sensing Devices
Apr 2016 · Taylor & Francis
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336
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About this ebook
Metal Oxide Nanostructures as Gas Sensing Devices explores the development of an integrated micro gas sensor that is based on advanced metal oxide nanostructures and is compatible with modern semiconductor fabrication technology. This sensor can then be used to create a compact, low-power, handheld device for analyzing air ambience.The book first c
About the author
G. Eranna is a scientist in the Sensors and Nanotechnology Group at the Central Electronics Engineering Research Institute (CEERI) of the Council of Scientific and Industrial Research (CSIR) in Pilani, India. He earned a Ph.D. from IIT Madras and has authored more than 70 publications. His research interests include MEMS-based micro gas sensors, integrated circuit fabrication technology, CMOS process standardization, solid-state micro gas sensors, MEMS devices and nanostructures, and the development of micro heaters for on-chip utilities.
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