Microsystems Mechanical Design

¡
¡ CISM International Centre for Mechanical Sciences āĻ•āĻŋāϤāĻžāĻĒ 478 ¡ Springer Science & Business Media
āχāĻŦ⧁āĻ•
211
āĻĒ⧃āĻˇā§āĻ āĻž
āĻŽā§‚āĻ˛ā§āϝāĻžāĻ‚āĻ•āύ āφ⧰⧁ āĻĒā§°ā§āϝāĻžāϞ⧋āϚāύāĻž āϏāĻ¤ā§āϝāĻžāĻĒāύ āϕ⧰āĻž āĻšā§‹ā§ąāĻž āύāĻžāχ  āĻ…āϧāĻŋāĻ• āϜāĻžāύāĻ•

āĻāχ āχāĻŦ⧁āĻ•āĻ–āύ⧰ āĻŦāĻŋāĻˇā§Ÿā§‡

Nowadays, micromechanics (i.e., mechanics of microsystems) is probably one of the most promising and rapidly growing fields among new emerging technologies. In fact, the possibility of reducing the size of mechanical structures to the micro-domain opens a wide variety of possible applications in the biomedical, aeronautical, and automotive fields, in robotics, in molecular engineering, in fiber optics, and infiuidics technology. One of the main aspects that slows down the development of innovative industrial products based on microsystem technology is the existing lack of engineering tools to allow a reliable design of microsystems . The aim of this book is that of collecting the texts o the lectures given at the CISM course on: Microsystems Mechanical Design, hold in July 2004. The purpose of this course was to introduce the basic tools used in the mechanical design of microsystems, the fabrication methods for these systems, and several applications of this technology. The links between micro- and nanotechnologies were also discussed and light was shed on the potential applications of microsystems to nano-scale manipulation of matter, thus introducing the topic of nano-scale engineering mechanics, which will be fully explored in a future course. This book is arranged in 8 sections. In the first section an introduction on microsystems and the techniques for their fabrication will be presented, with a thoroughly description of surface and bulk micromachining techniques and of other microfabrication processes as LIGA and anoding bonding.

āϞāĻŋāĻ–āϕ⧰ āĻŦāĻŋāώāϝāĻŧ⧇

Francesco De Bona, University of Udine, Italy. Eniko T. Enikov, University of Arizona, USA.

āĻāχ āχāĻŦ⧁āĻ•āĻ–āύāĻ• āĻŽā§‚āĻ˛ā§āϝāĻžāĻ‚āĻ•āύ āϕ⧰āĻ•

āφāĻŽāĻžāĻ• āφāĻĒā§‹āύāĻžā§° āĻŽāϤāĻžāĻŽāϤ āϜāύāĻžāĻ“āĻ•āĨ¤

āĻĒāĻĸāĻŧāĻžā§° āύāĻŋāĻ°ā§āĻĻ⧇āĻļāĻžā§ąāϞ⧀

āĻ¸ā§āĻŽāĻžā§°ā§āϟāĻĢ’āύ āφ⧰⧁ āĻŸā§‡āĻŦāϞ⧇āϟ
Android āφ⧰⧁ iPad/iPhoneā§° āĻŦāĻžāĻŦ⧇ Google Play Books āĻāĻĒāĻŸā§‹ āχāύāĻˇā§āϟāϞ āϕ⧰āĻ•āĨ¤ āχ āĻ¸ā§āĻŦāϝāĻŧāĻ‚āĻ•ā§āϰāĻŋāϝāĻŧāĻ­āĻžā§ąā§‡ āφāĻĒā§‹āύāĻžā§° āĻāĻ•āĻžāωāĻŖā§āϟ⧰ āϏ⧈āϤ⧇ āĻ›āĻŋāĻ‚āĻ• āĻšāϝāĻŧ āφ⧰⧁ āφāĻĒ⧁āύāĻŋ āϝ'āϤ⧇ āύāĻžāĻĨāĻžāĻ•āĻ• āϤ'āϤ⧇āχ āϕ⧋āύ⧋ āĻ…āĻĄāĻŋāĻ…'āĻŦ⧁āĻ• āĻ…āύāϞāĻžāχāύ āĻŦāĻž āĻ…āĻĢāϞāĻžāχāύāϤ āĻļ⧁āύāĻŋāĻŦāϞ⧈ āϏ⧁āĻŦāĻŋāϧāĻž āĻĻāĻŋāϝāĻŧ⧇āĨ¤
āϞ⧇āĻĒāϟāĻĒ āφ⧰⧁ āĻ•āĻŽā§āĻĒāĻŋāωāϟāĻžā§°
āφāĻĒ⧁āύāĻŋ āĻ•āĻŽā§āĻĒāĻŋāωāϟāĻžā§°ā§° ā§ąā§‡āĻŦ āĻŦā§āϰāĻžāωāϜāĻžā§° āĻŦā§āĻ¯ā§ąāĻšāĻžā§° āϕ⧰āĻŋ Google PlayāϤ āĻ•āĻŋāύāĻž āĻ…āĻĄāĻŋāĻ…'āĻŦ⧁āĻ•āϏāĻŽā§‚āĻš āĻļ⧁āύāĻŋāĻŦ āĻĒāĻžā§°ā§‡āĨ¤
āχ-ā§°ā§€āĻĄāĻžā§° āφ⧰⧁ āĻ…āĻ¨ā§āϝ āĻĄāĻŋāĻ­āĻžāχāϚ
Kobo eReadersā§° āĻĻ⧰⧇ āχ-āϚāĻŋ⧟āĻžāρāĻšā§€ā§° āĻĄāĻŋāĻ­āĻžāχāϚāϏāĻŽā§‚āĻšāϤ āĻĒā§āĻŋāĻŦāϞ⧈, āφāĻĒ⧁āύāĻŋ āĻāϟāĻž āĻĢāĻžāχāϞ āĻĄāĻžāωāύāĻ˛â€™āĻĄ āϕ⧰āĻŋ āϏ⧇āχāĻŸā§‹ āφāĻĒā§‹āύāĻžā§° āĻĄāĻŋāĻ­āĻžāχāϚāϞ⧈ āĻ¸ā§āĻĨāĻžāύāĻžāĻ¨ā§āϤ⧰āĻŖ āϕ⧰āĻŋāĻŦ āϞāĻžāĻ—āĻŋāĻŦāĨ¤ āϏāĻŽā§°ā§āĻĨāĻŋāϤ āχ-ā§°āĻŋāĻĄāĻžā§°āϞ⧈ āĻĢāĻžāχāϞāĻŸā§‹ āϕ⧇āύ⧇āĻ•ā§ˆ āĻ¸ā§āĻĨāĻžāύāĻžāĻ¨ā§āϤ⧰ āϕ⧰āĻŋāĻŦ āϜāĻžāύāĻŋāĻŦāϞ⧈ āϏāĻšāĻžāϝāĻŧ āϕ⧇āĻ¨ā§āĻĻā§ā§°āϤ āĻĨāĻ•āĻž āϏāĻŦāĻŋāĻļ⧇āώ āύāĻŋā§°ā§āĻĻ⧇āĻļāĻžā§ąāϞ⧀ āϚāĻžāĻ“āĻ•āĨ¤