Microsystems Mechanical Design
Francesco De Bona ¡ Eniko T. Enikov
āĻŽāĻžā§°ā§āĻ ā§¨ā§Ļā§Ļā§ ¡ CISM International Centre for Mechanical Sciences āĻāĻŋāĻ¤āĻžāĻĒ 478 ¡ Springer Science & Business Media
āĻāĻŦā§āĻ
211
āĻĒā§āĻˇā§āĻ āĻž
reportāĻŽā§āĻ˛ā§āĻ¯āĻžāĻāĻāĻ¨ āĻā§°ā§ āĻĒā§°ā§āĻ¯āĻžāĻ˛ā§āĻāĻ¨āĻž āĻ¸āĻ¤ā§āĻ¯āĻžāĻĒāĻ¨ āĻā§°āĻž āĻšā§ā§ąāĻž āĻ¨āĻžāĻ  āĻ
āĻ§āĻŋāĻ āĻāĻžāĻ¨āĻ
āĻāĻ āĻāĻŦā§āĻāĻāĻ¨ā§° āĻŦāĻŋāĻˇā§ā§
Nowadays, micromechanics (i.e., mechanics of microsystems) is probably one of the most promising and rapidly growing fields among new emerging technologies. In fact, the possibility of reducing the size of mechanical structures to the micro-domain opens a wide variety of possible applications in the biomedical, aeronautical, and automotive fields, in robotics, in molecular engineering, in fiber optics, and infiuidics technology. One of the main aspects that slows down the development of innovative industrial products based on microsystem technology is the existing lack of engineering tools to allow a reliable design of microsystems . The aim of this book is that of collecting the texts o the lectures given at the CISM course on: Microsystems Mechanical Design, hold in July 2004. The purpose of this course was to introduce the basic tools used in the mechanical design of microsystems, the fabrication methods for these systems, and several applications of this technology. The links between micro- and nanotechnologies were also discussed and light was shed on the potential applications of microsystems to nano-scale manipulation of matter, thus introducing the topic of nano-scale engineering mechanics, which will be fully explored in a future course. This book is arranged in 8 sections. In the first section an introduction on microsystems and the techniques for their fabrication will be presented, with a thoroughly description of surface and bulk micromachining techniques and of other microfabrication processes as LIGA and anoding bonding.
āĻ˛āĻŋāĻāĻā§° āĻŦāĻŋāĻˇāĻ¯āĻŧā§
Francesco De Bona, University of Udine, Italy. Eniko T. Enikov, University of Arizona, USA.
āĻāĻ āĻāĻŦā§āĻāĻāĻ¨āĻ āĻŽā§āĻ˛ā§āĻ¯āĻžāĻāĻāĻ¨ āĻā§°āĻ
āĻāĻŽāĻžāĻ āĻāĻĒā§āĻ¨āĻžā§° āĻŽāĻ¤āĻžāĻŽāĻ¤ āĻāĻ¨āĻžāĻāĻāĨ¤
āĻĒāĻĸāĻŧāĻžā§° āĻ¨āĻŋāĻ°ā§āĻĻā§āĻļāĻžā§ąāĻ˛ā§
āĻ¸ā§āĻŽāĻžā§°ā§āĻāĻĢâāĻ¨ āĻā§°ā§ āĻā§āĻŦāĻ˛ā§āĻ
Android āĻā§°ā§ iPad/iPhoneā§° āĻŦāĻžāĻŦā§ Google Play Books āĻāĻĒāĻā§ āĻāĻ¨āĻˇā§āĻāĻ˛ āĻā§°āĻāĨ¤ āĻ āĻ¸ā§āĻŦāĻ¯āĻŧāĻāĻā§āĻ°āĻŋāĻ¯āĻŧāĻāĻžā§ąā§ āĻāĻĒā§āĻ¨āĻžā§° āĻāĻāĻžāĻāĻŖā§āĻā§° āĻ¸ā§āĻ¤ā§ āĻāĻŋāĻāĻ āĻšāĻ¯āĻŧ āĻā§°ā§ āĻāĻĒā§āĻ¨āĻŋ āĻ¯'āĻ¤ā§ āĻ¨āĻžāĻĨāĻžāĻāĻ āĻ¤'āĻ¤ā§āĻ āĻā§āĻ¨ā§ āĻ
āĻĄāĻŋāĻ
'āĻŦā§āĻ āĻ
āĻ¨āĻ˛āĻžāĻāĻ¨ āĻŦāĻž āĻ
āĻĢāĻ˛āĻžāĻāĻ¨āĻ¤ āĻļā§āĻ¨āĻŋāĻŦāĻ˛ā§ āĻ¸ā§āĻŦāĻŋāĻ§āĻž āĻĻāĻŋāĻ¯āĻŧā§āĨ¤
āĻ˛ā§āĻĒāĻāĻĒ āĻā§°ā§ āĻāĻŽā§āĻĒāĻŋāĻāĻāĻžā§°
āĻāĻĒā§āĻ¨āĻŋ āĻāĻŽā§āĻĒāĻŋāĻāĻāĻžā§°ā§° ā§ąā§āĻŦ āĻŦā§āĻ°āĻžāĻāĻāĻžā§° āĻŦā§āĻ¯ā§ąāĻšāĻžā§° āĻā§°āĻŋ Google PlayāĻ¤ āĻāĻŋāĻ¨āĻž āĻ
āĻĄāĻŋāĻ
'āĻŦā§āĻāĻ¸āĻŽā§āĻš āĻļā§āĻ¨āĻŋāĻŦ āĻĒāĻžā§°ā§āĨ¤
āĻ-ā§°ā§āĻĄāĻžā§° āĻā§°ā§ āĻ
āĻ¨ā§āĻ¯ āĻĄāĻŋāĻāĻžāĻāĻ
Kobo eReadersā§° āĻĻā§°ā§ āĻ-āĻāĻŋā§āĻžāĻāĻšā§ā§° āĻĄāĻŋāĻāĻžāĻāĻāĻ¸āĻŽā§āĻšāĻ¤ āĻĒā§āĻŋāĻŦāĻ˛ā§, āĻāĻĒā§āĻ¨āĻŋ āĻāĻāĻž āĻĢāĻžāĻāĻ˛ āĻĄāĻžāĻāĻ¨āĻ˛âāĻĄ āĻā§°āĻŋ āĻ¸ā§āĻāĻā§ āĻāĻĒā§āĻ¨āĻžā§° āĻĄāĻŋāĻāĻžāĻāĻāĻ˛ā§ āĻ¸ā§āĻĨāĻžāĻ¨āĻžāĻ¨ā§āĻ¤ā§°āĻŖ āĻā§°āĻŋāĻŦ āĻ˛āĻžāĻāĻŋāĻŦāĨ¤ āĻ¸āĻŽā§°ā§āĻĨāĻŋāĻ¤ āĻ-ā§°āĻŋāĻĄāĻžā§°āĻ˛ā§ āĻĢāĻžāĻāĻ˛āĻā§ āĻā§āĻ¨ā§āĻā§ āĻ¸ā§āĻĨāĻžāĻ¨āĻžāĻ¨ā§āĻ¤ā§° āĻā§°āĻŋāĻŦ āĻāĻžāĻ¨āĻŋāĻŦāĻ˛ā§ āĻ¸āĻšāĻžāĻ¯āĻŧ āĻā§āĻ¨ā§āĻĻā§ā§°āĻ¤ āĻĨāĻāĻž āĻ¸āĻŦāĻŋāĻļā§āĻˇ āĻ¨āĻŋā§°ā§āĻĻā§āĻļāĻžā§ąāĻ˛ā§ āĻāĻžāĻāĻāĨ¤
