Reliability of MEMS: Testing of Materials and Devices

Enabling Technology for MEMS and Nanodevices: Advanced Micro and Nanosystems

CMOS - MEMS

Micro Process Engineering: Fundamentals, Devices, Fabrication, and Applications

Thermoelectric Energy Conversion: Basic Concepts and Device Applications

Thermoelectric Energy Conversion: Basic Concepts and Device Applications

Inkjet-based Micromanufacturing

Microengineering of Metals and Ceramics, Part I: Design, Tooling, and Injection Molding

Microengineering of Metals and Ceramics: Special Replication Techniques, Automation, and Properties

System-level Modeling of MEMS

Micro Energy Harvesting

Resonant MEMS: Fundamentals, Implementation, and Application

Micro Energy Harvesting

Resonant MEMS: Fundamentals, Implementation, and Application

Micro- and Nanomanipulation Tools

Micro- and Nanomanipulation Tools

Micro and Nano Scale NMR: Technologies and Systems

Micro and Nano Scale NMR: Technologies and Systems